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Equipment Detail

Name

MRC 8667 sputter system

Manufacturer

Perkin Elmer

Make or Model

MRC 8667 sputter system

Description

Three target (6”, 6-3/8”, and 8”) cryogenically pumped, PVD sputtered films deposition system with rotating sample table for high throughput

External Link

Picture

Contact Information

Contact Name

Neal Ricks

Telephone Number

305-348-1651

Fax

305-348-2649

Email

Neal.Ricks@fiu.edu
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