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Equipment Detail

Name

AJA ATC1600 sputter system

Manufacturer

AJA International

Make or Model

ATC1600

Description

Three target (2” ea.) turbo pumped, PVD sputtered films deposition system (currently not operational).

 

External Link

Picture

Contact Information

Contact Name

Neal Ricks

Telephone Number

305-348-1651

Fax

305-348-2649

Email

Neal.Ricks@fiu.edu
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