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Equipment Detail

Name

AJA Orion sputter system

Manufacturer

AJA International

Make or Model

Description

Three target (2” ea.), turbo pumped, PVD sputtered films deposition system with load lock for quick pump down/cycle time.

 

External Link

Picture

Contact Information

Contact Name

Neal Ricks

Telephone Number

305-348-1651

Fax

305-348-2649

Email

Neal.Ricks@fiu.edu
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