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Equipment Detail

Name

PlasmaTherm 790 PECVD/CVD reactor

Manufacturer

PlasmaTherm

Make or Model

790 PECVD/CVD reactor

Description

‚ÄčTurbo pumped, with switchable electrode for dielectric deposition or etch.

External Link

Picture

Contact Information

Contact Name

Neal Ricks

Telephone Number

305-348-1651

Fax

305-348-2649

Email

Neal.Ricks@fiu.edu
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