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Equipment Detail

Name

OAI 800 Mask Aligner

Manufacturer

OAI

Make or Model

800 Mask Aligner

Description

‚ÄčPhotolithography exposure tool capable of front to back alignment for MEMS device fabrication, and an additional module for Nanoimprint Lithography.

External Link

Picture

Contact Information

Contact Name

Neal Ricks

Telephone Number

305-348-1651

Fax

305-348-2649

Email

Neal.Ricks@fiu.edu
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