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Equipment Detail

Name

Heidelberg PG 101 Direct-write Laser Pattern Generator

Manufacturer

Heidelberg

Make or Model

Description

For exposure of photomasks or direct patterning of photoresist on substrates.  Capable of automated layer-to-layer alignment via pattern recognition feature.

 

External Link

Picture

Contact Information

Contact Name

Neal Ricks

Telephone Number

305-348-1651

Fax

305-348-2649

Email

Neal.Ricks@fiu.edu
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